G001 UP

Ducoya® G001 UP is an ultra-pure polyimide for semiconductors. The material is intended for use in the latest semiconductor manufacturing operations where feature sizes can be found in the low nanometer range.

G001 UP is a remarkable material that combines plasma resistance, minimal outgassing in hard vacuum conditions, excellent elastic recovery, and toughness. These properties are retained at high temperatures up to 400°C in a vacuum. This combination of properties can accommodate the mixed materials that can make up plasma chamber furniture for etching and deposition activities and help enable very finely controlled EUV imaging processes.

The elastic recovery, good conformance and low permeability of Ducoya G001 UP mean it can be used as part of a sealing solution, outperforming other polyimides. PFAS materials are not intentionally added to Ducoya G001 UP or used as process aids in its manufacture.

PFAS substances are not intentionally added to Ducoya G001 UP or used as processing aids in its manufacture.

Ducoya G001 UP has a “soft but strong” characterisation, holding wafers conformably but firmly, minimising the risk of damage. Ducoya can be polished to very fine surface finishes and easily machined to extremely tight tolerances. It also possesses excellent electrical insulation properties. These properties, combined with high purity and other favourable characteristics mentioned above, can be useful for holding, handling, and probing wafers during the fabrication process.

If ultra-high purity is not required but high precision, dimensional stability, wear resistance, high-temperature capability, and electrical properties still appeal to you for applications such as semiconductor test sockets, please consider Ducoya G001 with standard purity.

For food, medical or other applications where ultra-high purity may be required, please get in touch with Duvelco.